CAS number 4109-96-0 YesY
PubChem 61330, 22967941 ((2H2)silane)
ChemSpider 55266 YesY
EC number 22​3-888-3
UN number 2189
RTECS number VV3050000
Jmol-3D images Image 1
Molecular formula H2Cl2Si
Molar mass 101.01 g mol−1
Exact mass 99.930282011 g mol-1
Appearance Colorless gas with characteristic odor
Melting point

-122 °C, 151 K, -188 °F

Boiling point

8 °C, 281 K, 46 °F

Solubility in water Reacts
Vapor pressure 163.6 kPa (20 °C)
EU Index Not listed
Main hazards Extremely flammable gas, explosive in air
NFPA 704
NFPA 704.svg
Flash point −28 °C
Explosive limits 4.1–99%
Related compounds
Related chlorosilanes Chlorosilane
Silicon tetrachloride
Related compounds Difluorosilane
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Except where noted otherwise, data are given for materials in their standard state (at 25 °C, 100 kPa)
Infobox references

Dichlorosilane (H2SiCl2), or DCS as it is commonly known, is usually mixed with ammonia (NH3) in LPCVD chambers to grow silicon nitride in semiconductor processing.

A higher concentration of DCS:NH3 (i.e. 16:1), usually results in lower stress nitride films.

It is an intermediate between silane and silicon tetrachloride.

External links

  • Safety data for dichlorosilane from the Chemistry Department at Oxford University.

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