- IEEE Transactions on Semiconductor Manufacturing
IEEETransactions on Semiconductor Manufacturing (SM) is a quarterly journalpublished by the IEEE Computer Society. It contains peer-reviewed articles and other contribitions in the area of semiconductor device fabrication.
The journal covers areas of process and equipment control, simulation and modeling from the factory to the detailed process level, defect control, yield analysis and optimization, production planning and scheduling, environmental issues in semiconductor manufacturing, manufacturability improvement.
It is a joint publication of
IEEE Solid-State Circuits Society
IEEE Components, Packaging and Manufacturing Technology Society
IEEE Electron Devices Society
IEEE Reliability Society
* [http://www.cpmt.org/trans/trans-sm.html Joutnal's home page]
* [http://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=66 Journal profile at IEEEXplore]
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