- Surface analysis tools
Surface analysis tools include AES (
Auger Electron Spectroscopy); ESCA ( Electron Spectroscopyfor Chemical Analysis), also known as XPS ( X-ray photoelectron spectroscopy); and SSIM (Static secondary ion mass spectrometry).
Surface analysis tools are most often used to characterize elemental composition and
chemistryof the outer surface (top 4 to 5 nm) and employ electron, x-ray, and ionprobes, often in combination with depth profiling techniques.
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