Dichlorosilane Identifiers CAS number PubChem , ((2H2)silane) ChemSpider EC number UN number 2189 RTECS number VV3050000 Jmol-3D images Image 1 Properties Molecular formula H2Cl2Si Molar mass 101.01 g mol−1 Exact mass 99.930282011 g mol-1 Appearance Colorless gas with characteristic odor Melting point
-122 °C, 151 K, -188 °F
8 °C, 281 K, 46 °F
Solubility in water Reacts Vapor pressure 163.6 kPa (20 °C) Hazards MSDS ICSC 0442 EU Index Not listed Main hazards Extremely flammable gas, explosive in air NFPA 704 Flash point −28 °C Explosive limits 4.1–99% Related compounds Related chlorosilanes Chlorosilane
Related compounds Difluorosilane
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Except where noted otherwise, data are given for materials in their standard state (at 25 °C, 100 kPa)
Dichlorosilane (H2SiCl2), or DCS as it is commonly known, is usually mixed with ammonia (NH3) in LPCVD chambers to grow silicon nitride in semiconductor processing.
A higher concentration of DCS:NH3 (i.e. 16:1), usually results in lower stress nitride films.
- Safety data for dichlorosilane from the Chemistry Department at Oxford University.
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