Dichlorosilane


Dichlorosilane
Dichlorosilane
Identifiers
CAS number 4109-96-0 YesY
PubChem 61330, 22967941 ((2H2)silane)
ChemSpider 55266 YesY
EC number 22​3-888-3
UN number 2189
RTECS number VV3050000
Jmol-3D images Image 1
Properties
Molecular formula H2Cl2Si
Molar mass 101.01 g mol−1
Exact mass 99.930282011 g mol-1
Appearance Colorless gas with characteristic odor
Melting point

-122 °C, 151 K, -188 °F

Boiling point

8 °C, 281 K, 46 °F

Solubility in water Reacts
Vapor pressure 163.6 kPa (20 °C)
Hazards
MSDS ICSC 0442
EU Index Not listed
Main hazards Extremely flammable gas, explosive in air
NFPA 704
NFPA 704.svg
4
4
2
W
Flash point −28 °C
Explosive limits 4.1–99%
Related compounds
Related chlorosilanes Chlorosilane
Trichlorosilane
Silicon tetrachloride
Related compounds Difluorosilane
Dibromosilane
Dichloromethane
 YesY (verify) (what is: YesY/N?)
Except where noted otherwise, data are given for materials in their standard state (at 25 °C, 100 kPa)
Infobox references

Dichlorosilane (H2SiCl2), or DCS as it is commonly known, is usually mixed with ammonia (NH3) in LPCVD chambers to grow silicon nitride in semiconductor processing.

A higher concentration of DCS:NH3 (i.e. 16:1), usually results in lower stress nitride films.

It is an intermediate between silane and silicon tetrachloride.

External links

  • Safety data for dichlorosilane from the Chemistry Department at Oxford University.

Wikimedia Foundation. 2010.

Look at other dictionaries:

  • dichlorosilane — noun The gas SiHCl that is used to grow silicon nitride crystals for semiconductors …   Wiktionary

  • Chemical vapor deposition — DC plasma (violet) enhances the growth of carbon nanotubes in this laboratory scale PECVD apparatus. Chemical vapor deposition (CVD) is a chemical process used to produce high purity, high performance solid materials. The process is often used in …   Wikipedia

  • Chlorosilane — Chlorosilane …   Wikipedia

  • Silane — This article is about the compound with chemical formula SiH4. For other silicon hydrogen compounds, see Silanes. Silane …   Wikipedia

  • DCS — may refer to: Contents 1 Education 2 European politics 3 Medicine 4 Technology 5 Government …   Wikipedia

  • Trichlorosilane — Chembox new ImageFile = Trichlorosilane 2D stereo.png ImageSize = 120px ImageFileL1 = Trichlorosilane 3D balls.png ImageSizeL1 = 120px ImageFileR1 = Trichlorosilane 3D vdW.png ImageSizeR1 = 120px IUPACName = trichlorosilane OtherNames = silyl… …   Wikipedia

  • Epitaxy — refers to the method of depositing a monocrystalline film on a monocrystalline substrate. The deposited film is denoted as epitaxial film or epitaxial layer. The term epitaxy comes from a Greek root ( epi above and taxis in ordered manner ) which …   Wikipedia

  • List of inorganic compounds — Tentative listing related to this page, inorganic compounds by element (presently under construction), as well as . This list is not necessarily complete or up to date ndash; if you see an article that should be here but isn t (or one that… …   Wikipedia

  • Strained silicon — is a layer of silicon in which the silicon atoms are stretched beyond their normal interatomic distance. This can be accomplished by putting the layer of silicon over a substrate of silicon germanium (SiliconGermanium). As the atoms in the… …   Wikipedia

  • Tungsten disilicide — Chembox new Name = Tungsten(IV) silicide ImageFile = ImageName = Tungsten disilicide OtherNames = Section1 = Chembox Identifiers CASNo = 12039 88 2 Section2 = Chembox Properties Formula = WSi2 MolarMass = 240.02 g/mol Appearance = blue odorless… …   Wikipedia