Policide (engineering)


Policide (engineering)

Policide (also spelled polyside) in engineering refers to a combination of a silicide and polysilicon.

In chemical engineering, "policide" or "polyside" is used to describe a combination of polysilicon and a silicide. [cite journal
last = Yckache
first = K
coauthors = P. Boivina, F. Baigeta, C. Kristukatb, G. Aurielb, B. Sagnesb, J. Oualidb and A. Glachant
title = Influence of polycide deposition on the reliability of wet and nitrided oxides
journal = Journal of Non-Crystalline Solids
volume = 245
issue = 1-3
pages = 97–103
publisher =
date = April, 1999
url = http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6TXM-3W4PPPP-J&_coverDate=04%2F01%2F1999&_alid=473844827&_rdoc=1&_fmt=&_orig=search&_qd=1&_cdi=5594&_sort=d&view=c&_acct=C000050221&_version=1&_urlVersion=0&_userid=10&md5=d544d29cf92df5b3bebcb949d03f2cef
doi = 10.1016/S0022-3093(98)00854-0
, abstract viewed 10-24-2006
]

References


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