Titanium(IV) silicide

Titanium(IV) silicide

Chembox new
Name = Titanium(IV) silicide
ImageFile = Titanium(IV)_silicide.jpg
ImageName = Titanium(IV) silicide
OtherNames = titanium tetrasilicide
Section1 = Chembox Identifiers
CASNo = 12039-83-7

Section2 = Chembox Properties
Formula = TiSi2
MolarMass = 104.038 g/mol
Appearance = black crystals
Density = 4 g/cm3, solid
MeltingPt = 1500°C
BoilingPt =

Section3 = Chembox Structure
CrystalStruct = orthorhombic

Section7 = Chembox Hazards
EUClass = not listed

Titanium(IV) silicide (TiSi2) is an inorganic chemical compound.

Titanium silicide is used in semiconductor industry. It's typically grown by means of salicide technology over silicon and polysilicon lines to reduce the sheet resistance of local transistors connections.In microelectronic industry is typically used in the C54 phase.

References


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